Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6091045 | Plasma processing apparatus utilizing a microwave window having a thinner inner area | Hiroshi Mabuchi, Junya Tsuyuguchi, Katsuo Katayama, Hideo Ida, Tomomi Murakami +1 more | 2000-07-18 |
| 5951887 | Plasma processing apparatus and plasma processing method | Hiroshi Mabuchi, Hideo Ida, Tomomi Murakami, Naohiko Takeda, Junya Tsuyuguchi +1 more | 1999-09-14 |
| 5885472 | Method for detecting etching endpoint, and etching apparatus and etching system using the method thereof | Toshiya Miyazaki, Tadao Nakatsuka, Hiroyuki Tanaka, Toshiyuki Nakamura | 1999-03-23 |
| 5705019 | Plasma processing apparatus | Minoru Yamada | 1998-01-06 |
| 5626714 | Method for detecting etching endpoint and etching apparatus and etching system using the method thereof | Toshiya Miyazaki, Tadao Nakatsuka, Hiroyuki Tanaka, Toshiyuki Nakamura | 1997-05-06 |