Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669810 | Method for detecting etching endpoint, and etching apparatus and etching system using the method thereof | Toshiya Miyazaki, Toshihiro Hayami, Hiroyuki Tanaka, Toshiyuki Nakamura | 2003-12-30 |
| 6149761 | Etching apparatus and etching system using the method thereof | Toshiya Miyazaki, Toshihiro Hayami, Hiroyuki Tanaka, Toshiyuki Nakamura | 2000-11-21 |
| 5885472 | Method for detecting etching endpoint, and etching apparatus and etching system using the method thereof | Toshiya Miyazaki, Toshihiro Hayami, Hiroyuki Tanaka, Toshiyuki Nakamura | 1999-03-23 |
| 5626714 | Method for detecting etching endpoint and etching apparatus and etching system using the method thereof | Toshiya Miyazaki, Toshihiro Hayami, Hiroyuki Tanaka, Toshiyuki Nakamura | 1997-05-06 |