Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083820 | Dual-frequency surface wave plasma source | Jason Marion, Alok Ranjan | 2018-09-25 |
| 10063062 | Method of detecting plasma discharge in a plasma processing system | Alok Ranjan | 2018-08-28 |
| 10064262 | Apparatus for treating a gas stream | Mark Attwood | 2018-08-28 |
| 9966312 | Method for etching a silicon-containing substrate | Alok Ranjan | 2018-05-08 |
| 9779952 | Method for laterally trimming a hardmask | Alok Ranjan | 2017-10-03 |
| 9530626 | Method and apparatus for ESC charge control for wafer clamping | Jason Marion, Sonam D. Sherpa, Alok Ranjan, Yoshio Ishikawa, Takashi Enomoto | 2016-12-27 |
| 9512518 | Apparatus for treating a gas stream | Christopher J. Clements, John Leslie Bidder | 2016-12-06 |
| 9371581 | Apparatus for treating a gas stream | Christopher J. Clements, John Leslie Bidder, Daniel Martin McGrath | 2016-06-21 |
| 9346005 | Apparatus for treating a gas stream | John Leslie Bidder, Andrew Arthur Chambers | 2016-05-24 |
| 9277636 | Plasma torch | Christopher J. Clements, Daniel Martin McGrath, Fraser Gray, Andrew James Seeley | 2016-03-01 |
| 9155183 | Adjustable slot antenna for control of uniformity in a surface wave plasma source | Alok Ranjan | 2015-10-06 |
| 9101042 | Control of uniformity in a surface wave plasma source | Alok Ranjan | 2015-08-04 |