Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9459520 | Light source unit and optical engine | Takashi Sasamuro, Eiichiro Okahisa | 2016-10-04 |
| 8397182 | Pattern verifying method, pattern verifying device, program, and manufacturing method of semiconductor device | — | 2013-03-12 |
| 7534554 | Chemically amplified resist composition and manufacturing method of semiconductor integrated circuit device with such chemically amplified resist composition | Satoshi Watanabe, Kazunori Maeda | 2009-05-19 |
| 7479361 | Chemically amplified resist composition, process for manufacturing semiconductor device and patterning process | Masayuki Hiroi | 2009-01-20 |
| 7440077 | Exposure apparatus | — | 2008-10-21 |
| 7396633 | Chemically amplified resist composition and manufacturing method of semiconductor integrated circuit device with such chemically amplified resist composition | Satoshi Watanabe, Kazunori Maeda | 2008-07-08 |
| 7217654 | Semiconductor device and method of manufacturing the same | Kazutoshi Shiba, Nobuaki Hamanaka, Tatsuya Usami, Takashi Yokoyama | 2007-05-15 |
| 6800551 | Chemical amplification type photoresist composition, method for producing a semiconductor device using the composition, and semiconductor substrate | Toyohisa Sakurada, Takao Yoshihara | 2004-10-05 |
| 6774028 | Method of forming wiring structure by using photo resist having optimum development rate | — | 2004-08-10 |