Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10038194 | Negative electrode, method for producing the same, and battery | — | 2018-07-31 |
| 7217654 | Semiconductor device and method of manufacturing the same | Seiji Nagahara, Kazutoshi Shiba, Tatsuya Usami, Takashi Yokoyama | 2007-05-15 |
| 7199058 | Method of manufacturing a semiconductor device and apparatus for manufacturing a semiconductor device | Takuya Maruyama | 2007-04-03 |
| 6821687 | Photo mask for fabricating semiconductor device having dual damascene structure | Takashi Yokoyama, Kazutoshi Shiba, Noriaki Oda | 2004-11-23 |
| 6569766 | Method for forming a silicide of metal with a high melting point in a semiconductor device | Ken Inoue, Kaoru Mikagi | 2003-05-27 |
| 6548421 | Method for forming a refractory-metal-silicide layer in a semiconductor device | Ken Inoue, Kaoru Mikagi | 2003-04-15 |
| 6544890 | Process for fabricating semiconductor device having silicide layer with low resistance and uniform profile and sputtering system used therein | — | 2003-04-08 |
| 6482737 | Fabrication method of implanting silicon-ions into the silicon substrate | — | 2002-11-19 |
| 6436783 | Method of forming MOS transistor | Atsuki Ono | 2002-08-20 |
| 6337272 | Method of manufacturing a semiconductor device | — | 2002-01-08 |
| 6271549 | Process for fabricating a metal silicide layer of a semiconductor and apparatus | — | 2001-08-07 |