Issued Patents All Time
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5002008 | Coating apparatus and method for applying a liquid to a semiconductor wafer, including selecting a nozzle in a stand-by state | Mitsuru Ushijima, Osamu Hirakawa, Masami Akimoto, Yoshio Kimura | 1991-03-26 |