Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12033872 | Substrate processing apparatus and substrate processing method | Koji Ogura, Hiroshi Yoshida, Takashi Nagai, Jun Nonaka, Takumi Honda | 2024-07-09 |
| 11615971 | Substrate processing apparatus and processing liquid concentration method | Teruaki Konishi, Kouzou Kanagawa, Osamu Kuroda, Koji Tanaka, Kotaro Tsurusaki +2 more | 2023-03-28 |