Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7923680 | Analysis method and analysis apparatus | Shigeru Kawamura, Kohei Tsugita, Teruyuki Hayashi | 2011-04-12 |
| 7383841 | Method of cleaning substrate-processing device and substrate-processing device | Hiroshi Shinriki, Mikio Suzuki, Takashi Magara | 2008-06-10 |