Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8895942 | Dielectric treatment module using scanning IR radiation source | Jacques Faguet, Eric M. Lee, Dorel I. Toma, Hongyu Yue | 2014-11-25 |
| 8642488 | Multi-step system and method for curing a dielectric film | Eric M. Lee, Dorel Toma | 2014-02-04 |
| 8444848 | Electrochemical substrate slicing using electromagnetic wave excitation | Hongyu Yue, Dorel I. Toma | 2013-05-21 |
| 8242460 | Ultraviolet treatment apparatus | Hongyu Yue, Jacques Faguet, Dorel I. Toma | 2012-08-14 |
| 7977256 | Method for removing a pore-generating material from an uncured low-k dielectric film | Dorel I. Toma, Eric M. Lee | 2011-07-12 |
| 7858533 | Method for curing a porous low dielectric constant dielectric film | Dorel I. Toma, Eric M. Lee | 2010-12-28 |
| 7855123 | Method of integrating an air gap structure with a substrate | Eric M. Lee, Dorel I. Toma | 2010-12-21 |
| 7829268 | Method for air gap formation using UV-decomposable materials | Dorel I. Toma | 2010-11-09 |
| 7666754 | Method and system for forming an air gap structure | Dorel I. Toma | 2010-02-23 |
| 7622378 | Multi-step system and method for curing a dielectric film | Eric M. Lee, Dorel Toma | 2009-11-24 |