Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D559805 | Stage arm for a semiconductor wafer delivery apparatus | — | 2008-01-15 |
| D559806 | Pair of stage arms for a semiconductor wafer delivery apparatus | — | 2008-01-15 |
| 7283890 | Work convey system, unmanned convey vehicle system, unmanned convey vehicle, and work convey method | Toshihiko Iijima, Shuji Akiyama, Takashi Nakao | 2007-10-16 |
| 7153087 | Centering mechanism, centering unit, semiconductor manufacturing apparatus, and centering method | Ki-Sang Kang, Shuji Akiyama | 2006-12-26 |
| 5801527 | Apparatus and method for testing semiconductor device | Takao Ishii, Shuji Akiyama | 1998-09-01 |