Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10067514 | Substrate processing apparatus and liquid mixing method | Yasuo Kiyohara, Ikuo Sunaka, Koji Tanaka, Takami Satoh, Kazuyoshi Mizumoto +3 more | 2018-09-04 |
| 7451515 | Cleaning processing system and cleaning processing apparatus | Akira Ishihara | 2008-11-18 |