Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974779 | Interfacial oxidation process for high-k gate dielectric process integration | David L. O'Meara, Tsuyoshi Takahashi, Alessandro C. Callegari, Kristen Scheer, Sufi Zafar +1 more | 2005-12-13 |
| 6500761 | Method for improving the adhesion and durability of CVD tantalum and tantalum nitride modulated films by plasma treatment | Joseph T. Hillman | 2002-12-31 |
| 6455414 | Method for improving the adhesion of sputtered copper films to CVD transition metal based underlayers | Joseph T. Hillman, Steven P. Caliendo | 2002-09-24 |