Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6153044 | Protection of lithographic components from particle contamination | Leonard E. Klebanoff | 2000-11-28 |
| 6110844 | Reduction of particle deposition on substrates using temperature gradient control | Ronald C. Dykhuizen, Anthony S. Geller | 2000-08-29 |
| 6072157 | Thermophoretic vacuum wand | Leonard E. Klebanoff | 2000-06-06 |
| 5793478 | Apparatus for measuring particle properties | Jaime N. Castaneda, Thomas Grasser, John E. Brockmann | 1998-08-11 |
| 5777245 | Particle dispersing system and method for testing semiconductor manufacturing equipment | Madhavi R. Chandrachood, Steve Ghanayem, Nancy Cantwell, Anthony S. Geller | 1998-07-07 |
| 5522933 | Particle-free microchip processing | Anthony S. Geller | 1996-06-04 |