Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8911193 | Substrate processing sequence in a cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2014-12-16 |
| 7651306 | Cartesian robot cluster tool architecture | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2010-01-26 |
| 7374391 | Substrate gripper for a substrate handling robot | Michael R. Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2008-05-20 |
| 6404506 | Non-intrusive laser-based system for detecting objects moving across a planar surface | Harry H. Cheng, Benjamin D. Shaw, Joe Palen, Jonathan Erik Larson, Xudong Hu | 2002-06-11 |