Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7761179 | Method for consistent updates to automated process control (APC) models with partitioning along multiple components | Steven Carson | 2010-07-20 |
| 7517141 | Simultaneous control of deposition time and temperature of multi-zone furnaces | Amit Rajadhyaksha, James Boone | 2009-04-14 |
| 7424331 | System for implementing intelligent and accurate updates to state-based advanced process control (APC) models | — | 2008-09-09 |
| 7010381 | Versatile system for controlling semiconductor topography | Rajesh Tiwari | 2006-03-07 |
| 6941242 | Versatile system for variance-based data analysis | Rajesh Tiwari | 2005-09-06 |
| 6808942 | Method for controlling a critical dimension (CD) in an etch process | Brian Smith, Jeffrey Stephan Hodges, Dale R. Burrows, Yu-Lun Lin | 2004-10-26 |
| 6799136 | Method of estimation of wafer polish rates | Gregory A. Miller, Steven T. Jenkins | 2004-09-28 |
| 6631299 | System and method for self-tuning feedback control of a system | Steven T. Jenkins, Clifton E. Brooks, Stephanie L. Hilbun | 2003-10-07 |
| 6623333 | System and method for controlling a wafer polishing process | Gregory A. Miller, Christopher D. Guinn, Adriana Sanchez | 2003-09-23 |
| 6589800 | Method of estimation of wafer-to-wafer thickness | Gregory A. Miller, Steven T. Jenkins | 2003-07-08 |
| 6584369 | Method and system for dispatching semiconductor lots to manufacturing equipment for fabrication | Steven T. Jenkins | 2003-06-24 |