Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12242187 | Magnification ramp scheme to mitigate template slippage | Jeffrey D. Klein, Atsushi Kusaka | 2025-03-04 |
| 12032285 | Adaptive feedforward and feedback control for controlled viscosity alignment and field-to-field related friction variation | Mingji Lou, Takahiro Yoshida, Kenichi Kobayashi, Tatsuya Arakawa | 2024-07-09 |
| 11815811 | Magnification ramp scheme to mitigate template slippage | Jeffrey D. Klein, Atsushi Kusaka | 2023-11-14 |
| 11604408 | Adaptive feedforward and feedback control for controlled viscosity alignment and field-to-field related friction variation | Mingji Lou, Takahiro Yoshida, Kenichi Kobayashi, Tatsuya Arakawa | 2023-03-14 |
| 11422460 | Alignment control in nanoimprint lithography using feedback and feedforward control | Mingji Lou, Jeffrey D. Klein, Takahiro Yoshida, Byung-Jin Choi | 2022-08-23 |
| 6799136 | Method of estimation of wafer polish rates | Nital S. Patel, Gregory A. Miller | 2004-09-28 |
| 6631299 | System and method for self-tuning feedback control of a system | Nital S. Patel, Clifton E. Brooks, Stephanie L. Hilbun | 2003-10-07 |
| 6589800 | Method of estimation of wafer-to-wafer thickness | Nital S. Patel, Gregory A. Miller | 2003-07-08 |
| 6584369 | Method and system for dispatching semiconductor lots to manufacturing equipment for fabrication | Nital S. Patel | 2003-06-24 |