Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930028 | Antireflective structure and method | Maureen A. Hanratty, Qizhi He, Wei William Lee | 2005-08-16 |
| 6797633 | In-situ plasma ash/treatment after via etch of low-k films for poison-free dual damascene trench patterning | Ping Jiang, Robert J. Kraft, Kenneth Newton | 2004-09-28 |
| 6087220 | Stack etch method for flash memory devices | Reima Laaksonen, Cetin Kaya, Freidoon Mehrad, Men-Chee Chen | 2000-07-11 |
| 6010829 | Polysilicon linewidth reduction using a BARC-poly etch process | Guatam V. Thaker | 2000-01-04 |