Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10613319 | Compact, high-performance MEMS-based optical shutter | Robert Mihailovich, Alex Papavasiliou, Jeffrey F. DeNatale, Maximillian A. Perez | 2020-04-07 |
| 10416246 | Physics package for compact atomic device | Jeffrey F. DeNatale, Robert L. Borwick, III, Viktor Tarashansky | 2019-09-17 |
| 10325707 | Integrated field coil for compact atomic devices | Jeffrey F. DeNatale, Robert L. Borwick, III, Viktor Tarashansky | 2019-06-18 |
| 9607748 | Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof | Robert Mihailovich, Alex Papavasiliou, Vivek Mehrotra, Robert L. Borwick, III, Rahul Ganguli +1 more | 2017-03-28 |
| 9409768 | MEMS device with integrated temperature stabilization | Jeffrey F. DeNatale | 2016-08-09 |
| 9029259 | Self-aligning hybridization method | Yu-Hua Lin, Donald E. Cooper, Jeffrey F. DeNatale, William E. Tennant | 2015-05-12 |
| 8995800 | Method of fabricating silicon waveguides with embedded active circuitry | Robert L. Borwick, III, Robert Mihailovich, Jeffrey F. DeNatale | 2015-03-31 |
| 8937513 | Micro-scale system to provide thermal isolation and electrical communication between substrates | Jeffrey F. DeNatale, Yu-Hua Lin, Robert L. Borwick, III, Alexandros P. Papavasiliou | 2015-01-20 |
| 8847409 | Compliant micro-socket hybridization method | Jeffrey F. DeNatale, Yu-Hua Lin | 2014-09-30 |
| 8826514 | Microfabricated inductors with through-wafer vias | Alexandros P. Papavasiliou, Jeffrey F. DeNatale, Robert L. Borwick, III | 2014-09-09 |
| 8505357 | Method for adjusting resonance frequencies of a vibrating microelectromechanical device | Jeffrey F. DeNatale | 2013-08-13 |
| 8505358 | Method for adjusting resonance frequencies of a vibrating microelectromechanical device | Jeffrey F. DeNatale | 2013-08-13 |
| 8456249 | Micro-scale system to provide thermal isolation and electrical communication between substrates | Jeffrey F. DeNatale, Yu-Hua Lin, Robert L. Borwick, III, Alexandros P. Papavasiliou | 2013-06-04 |
| 8327684 | Method for adjusting resonance frequencies of a vibrating microelectromechanical device | Jeffrey F. DeNatale | 2012-12-11 |
| 8319156 | System for heating a vapor cell | Robert L. Borwick, III, Jeffrey F. DeNatale, Chialun Tsai, Ya-Chi Chen | 2012-11-27 |
| 8258884 | System for charging a vapor cell | Robert L. Borwick, III, Alan L. Sailer, Jeffrey F. DaNatale, Chialun Tsai | 2012-09-04 |
| 8187972 | Through-substrate vias with polymer fill and method of fabricating same | Jeffrey F. DeNatale, Robert L. Borwick, III, Alexandros P. Papavasiliou | 2012-05-29 |
| 8088667 | Method of fabricating vertical capacitors in through-substrate vias | Jeffrey F. DeNatale, Alexandros P. Papavasiliou, Robert L. Borwick, III | 2012-01-03 |
| 8080736 | Non-planar microcircuit structure and method of fabricating same | Jeffrey F. DeNatale, Robert L. Borwick, III | 2011-12-20 |
| 7987714 | Disc resonator gyroscope with improved frequency coincidence and method of manufacture | Jeffrey F. DeNatale | 2011-08-02 |
| 7810379 | High temperature microelectromechanical (MEM) devices | Jeffrey F. DeNatale, Robert L. Borwick, III | 2010-10-12 |
| 7735362 | Thermomechanical sensor for fluid diagnostics | Jeffrey F. DeNatale, Robert L. Borwick, III, Martin W. Kendig | 2010-06-15 |
| 7619485 | Compact optical assembly for chip-scale atomic clock | Jeffrey F. DeNatale, Robert L. Borwick, III, Chialun Tsai | 2009-11-17 |
| 7538032 | Low temperature method for fabricating high-aspect ratio vias and devices fabricated by said method | Robert L. Borwick, III, Jeffrey F. DeNatale, Chailun Tsai, Zhimin Jamie Yao, Kathleen Garrett +3 more | 2009-05-26 |
| 7346981 | Method for fabricating microelectromechanical system (MEMS) devices | Robert L. Borwick, III, Jeffrey F. DeNatale, Jun Yao, Sangtae Park | 2008-03-25 |