Issued Patents All Time
Showing 1–25 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10613319 | Compact, high-performance MEMS-based optical shutter | Robert Mihailovich, Alex Papavasiliou, Philip A. Stupar, Maximillian A. Perez | 2020-04-07 |
| 10416246 | Physics package for compact atomic device | Robert L. Borwick, III, Philip A. Stupar, Viktor Tarashansky | 2019-09-17 |
| 10325707 | Integrated field coil for compact atomic devices | Robert L. Borwick, III, Philip A. Stupar, Viktor Tarashansky | 2019-06-18 |
| 10084035 | Vertical capacitor contact arrangement | Alexandros P. Papavasiliou, David J. Gulbransen, Alan Roll | 2018-09-25 |
| 9607748 | Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof | Robert Mihailovich, Alex Papavasiliou, Vivek Mehrotra, Philip A. Stupar, Robert L. Borwick, III +1 more | 2017-03-28 |
| 9409768 | MEMS device with integrated temperature stabilization | Philip A. Stupar | 2016-08-09 |
| 9029259 | Self-aligning hybridization method | Philip A. Stupar, Yu-Hua Lin, Donald E. Cooper, William E. Tennant | 2015-05-12 |
| 8995800 | Method of fabricating silicon waveguides with embedded active circuitry | Philip A. Stupar, Robert L. Borwick, III, Robert Mihailovich | 2015-03-31 |
| 8937513 | Micro-scale system to provide thermal isolation and electrical communication between substrates | Philip A. Stupar, Yu-Hua Lin, Robert L. Borwick, III, Alexandros P. Papavasiliou | 2015-01-20 |
| 8847409 | Compliant micro-socket hybridization method | Yu-Hua Lin, Philip A. Stupar | 2014-09-30 |
| 8826514 | Microfabricated inductors with through-wafer vias | Alexandros P. Papavasiliou, Philip A. Stupar, Robert L. Borwick, III | 2014-09-09 |
| 8742308 | Imaging array device structure with separate charge storage capacitor layer | David J. Gulbransen, William E. Tennant, Alexandros P. Papavasiliou | 2014-06-03 |
| 8654332 | Chip-scale optics module for optical interrogators | Robert L. Borwick, III | 2014-02-18 |
| 8505357 | Method for adjusting resonance frequencies of a vibrating microelectromechanical device | Philip A. Stupar | 2013-08-13 |
| 8505358 | Method for adjusting resonance frequencies of a vibrating microelectromechanical device | Philip A. Stupar | 2013-08-13 |
| 8472098 | Manufacturing method for stress compensated X-Y gimbaled MEMS mirror array | Chialun Tsai | 2013-06-25 |
| 8456249 | Micro-scale system to provide thermal isolation and electrical communication between substrates | Philip A. Stupar, Yu-Hua Lin, Robert L. Borwick, III, Alexandros P. Papavasiliou | 2013-06-04 |
| 8327684 | Method for adjusting resonance frequencies of a vibrating microelectromechanical device | Philip A. Stupar | 2012-12-11 |
| 8319156 | System for heating a vapor cell | Robert L. Borwick, III, Chialun Tsai, Philip A. Stupar, Ya-Chi Chen | 2012-11-27 |
| 8211283 | Microfabricated liquid junction reference electrode | Martin W. Kendig | 2012-07-03 |
| 8187972 | Through-substrate vias with polymer fill and method of fabricating same | Philip A. Stupar, Robert L. Borwick, III, Alexandros P. Papavasiliou | 2012-05-29 |
| 8153062 | Analyte detection via electrochemically transported and generated reagent | Martin W. Kendig, Chuan-Hua Chen, D. Morgan Tench, Frederick M. Discenzo | 2012-04-10 |
| 8088667 | Method of fabricating vertical capacitors in through-substrate vias | Philip A. Stupar, Alexandros P. Papavasiliou, Robert L. Borwick, III | 2012-01-03 |
| 8080736 | Non-planar microcircuit structure and method of fabricating same | Philip A. Stupar, Robert L. Borwick, III | 2011-12-20 |
| 7989915 | Vertical electrical device | Stefan C. Lauxtermann, Per-Olov Pettersson | 2011-08-02 |