Issued Patents All Time
Showing 26–50 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7987714 | Disc resonator gyroscope with improved frequency coincidence and method of manufacture | Philip A. Stupar | 2011-08-02 |
| 7906404 | Power distribution for CMOS circuits using in-substrate decoupling capacitors and back side metal layers | Atul Joshi, Per-Olov Pettersson | 2011-03-15 |
| 7829462 | Through-wafer vias | Stefan C. Lauxtermann | 2010-11-09 |
| 7810379 | High temperature microelectromechanical (MEM) devices | Robert L. Borwick, III, Philip A. Stupar | 2010-10-12 |
| 7813028 | Manufacturing method for stress compensated X-Y gimbaled MEMS mirror array | Chialun Tsai | 2010-10-12 |
| 7790608 | Buried via technology for three dimensional integrated circuits | Stefan C. Lauxtermann | 2010-09-07 |
| 7786808 | Micro-structured optic apparatus | — | 2010-08-31 |
| 7735362 | Thermomechanical sensor for fluid diagnostics | Robert L. Borwick, III, Philip A. Stupar, Martin W. Kendig | 2010-06-15 |
| 7671460 | Buried via technology for three dimensional integrated circuits | Stefan C. Lauxtermann | 2010-03-02 |
| 7619485 | Compact optical assembly for chip-scale atomic clock | Robert L. Borwick, III, Philip A. Stupar, Chialun Tsai | 2009-11-17 |
| 7538032 | Low temperature method for fabricating high-aspect ratio vias and devices fabricated by said method | Robert L. Borwick, III, Philip A. Stupar, Chailun Tsai, Zhimin Jamie Yao, Kathleen Garrett +3 more | 2009-05-26 |
| 7346981 | Method for fabricating microelectromechanical system (MEMS) devices | Robert L. Borwick, III, Philip A. Stupar, Jun Yao, Sangtae Park | 2008-03-25 |
| 7329932 | Microelectromechanical (MEM) viscosity sensor and method | Robert L. Borwick, III, Philip A. Stupar | 2008-02-12 |
| 7328604 | Microelectromechanical (MEM) fluid health sensing device and fabrication method | Robert L. Borwick, III, Philip A. Stupar, Martin W. Kendig | 2008-02-12 |
| 7303935 | High temperature microelectromechanical (MEM) devices and fabrication method | Robert L. Borwick, III, Philip A. Stupar | 2007-12-04 |
| 7287415 | Microelectromechanical system (MEMS) viscosity sensor for fluid health monitoring | Robert L. Borwick, III, Philip A. Stupar | 2007-10-30 |
| 7261430 | Thermal and intrinsic stress compensated micromirror apparatus and method | Philip A. Stupar, Chialun Tsai, Robert L. Borwick, III | 2007-08-28 |
| 7157993 | 1:N MEM switch module | Robert Mihailovich, Jonathan B. Hacker | 2007-01-02 |
| 7108819 | Process for fabricating high aspect ratio embossing tool and microstructures | Alan B. Harker, Dennis R. Strauss | 2006-09-19 |
| 7068220 | Low loss RF phase shifter with flip-chip mounted MEMS interconnection | Jonathan B. Hacker, Robert Mihailovich, William R. Norvell | 2006-06-27 |
| 6979872 | Modules integrating MEMS devices with pre-processed electronic circuitry, and methods for fabricating such modules | Robert L. Borwick, III, Robert J. Anderson | 2005-12-27 |
| 6771081 | Liquid-medium immersed MEMs devices | Robert L. Borwick, III, Philip A. Stupar | 2004-08-03 |
| 5646583 | Acoustic isolator having a high impedance layer of hafnium oxide | Charles W. Seabury, Paul H. Kobrin | 1997-07-08 |
| 5334342 | Method of fabricating of diamond moth-eye surface | Alan B. Harker, Patrick J. Hood, John F. Flintoff | 1994-08-02 |
| 5095384 | Laser damage resistant vanadium dioxide films | — | 1992-03-10 |