Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8877299 | Method for enhancing a substrate using gas cluster ion beam processing | John Hautala, Koji Yamashita | 2014-11-04 |
| 8592784 | Method for modifying a material layer using gas cluster ion beam processing | John Hautala | 2013-11-26 |
| 7982196 | Method for modifying a material layer using gas cluster ion beam processing | John Hautala | 2011-07-19 |
| 7198820 | Deposition of carbon- and transition metal-containing thin films | Kari Harkonen, Mark L. Doczy, Teemu Lang | 2007-04-03 |
| 7193253 | Transition metal alloys for use as a gate electrode and devices incorporating these alloys | Mark L. Doczy, Robert S. Chau, Kari Harkonen, Teemu Lang | 2007-03-20 |
| 7030430 | Transition metal alloys for use as a gate electrode and devices incorporating these alloys | Mark L. Doczy, Robert S. Chau, Kari Harkonen, Teemu Lang | 2006-04-18 |