| 7198820 |
Deposition of carbon- and transition metal-containing thin films |
Kari Harkonen, Mark L. Doczy, Nathan E. Baxter |
2007-04-03 |
| 7191793 |
Diaphragm valve for atomic layer deposition |
Jarmo Maula, Hannu Leskinen, Pekka Kuosmanen, Kari Harkonen, Bradley J. Aitchison |
2007-03-20 |
| 7193253 |
Transition metal alloys for use as a gate electrode and devices incorporating these alloys |
Mark L. Doczy, Nathan E. Baxter, Robert S. Chau, Kari Harkonen |
2007-03-20 |
| 7141095 |
Precursor material delivery system for atomic layer deposition |
Bradley J. Aitchison, Jarmo Maula, Hannu Leskinen, Pekka Kuosmanen, Kari Harkonen +1 more |
2006-11-28 |
| 7030430 |
Transition metal alloys for use as a gate electrode and devices incorporating these alloys |
Mark L. Doczy, Nathan E. Baxter, Robert S. Chau, Kari Harkonen |
2006-04-18 |
| 7021330 |
Diaphragm valve with reliability enhancements for atomic layer deposition |
Jarmo Maula, Hannu Leskinen, Pekka Kuosmanen, Kari Harkonen, Bradley J. Aitchison |
2006-04-04 |
| 6941963 |
High-speed diaphragm valve for atomic layer deposition |
Jarmo Maula, Hannu Leskinen, Pekka Kuosmanen, Kari Harkonen, Bradley J. Aitchison |
2005-09-13 |
| 6907897 |
Diaphragm valve for high-temperature precursor supply in atomic layer deposition |
Jarmo Maula, Hannu Leskinen, Pekka Kuosmanen, Kari Harkonen, Bradley J. Aitchison |
2005-06-21 |