Teemu Lang — 8 Patents at Planar Systems

Teemu Lang has been granted 8 US patents while listed as an inventor at Planar Systems. The first was granted in 2005 and the most recent in April 2007. Teemu Lang ranks #600,572 of 4,157,543 US inventors in our database (top 14.4%). Patent records list Teemu Lang in Helsinki, FI.

Issued Patents All Time

Showing 1–8 of 8 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
7198820	Deposition of carbon- and transition metal-containing thin films	Kari Harkonen, Mark L. Doczy, Nathan E. Baxter	2007-04-03	$1,267,000
7191793	Diaphragm valve for atomic layer deposition	Jarmo Maula, Hannu Leskinen, Pekka Kuosmanen, Kari Harkonen, Bradley J. Aitchison	2007-03-20	$1,227,000
7193253	Transition metal alloys for use as a gate electrode and devices incorporating these alloys	Mark L. Doczy, Nathan E. Baxter, Robert S. Chau, Kari Harkonen	2007-03-20	$12,397,000
7141095	Precursor material delivery system for atomic layer deposition	Bradley J. Aitchison, Jarmo Maula, Hannu Leskinen, Pekka Kuosmanen, Kari Harkonen +1 more	2006-11-28	$1,855,000
7030430	Transition metal alloys for use as a gate electrode and devices incorporating these alloys	Mark L. Doczy, Nathan E. Baxter, Robert S. Chau, Kari Harkonen	2006-04-18	$13,047,000
7021330	Diaphragm valve with reliability enhancements for atomic layer deposition	Jarmo Maula, Hannu Leskinen, Pekka Kuosmanen, Kari Harkonen, Bradley J. Aitchison	2006-04-04	$1,244,000
6941963	High-speed diaphragm valve for atomic layer deposition	Jarmo Maula, Hannu Leskinen, Pekka Kuosmanen, Kari Harkonen, Bradley J. Aitchison	2005-09-13	$932,000
6907897	Diaphragm valve for high-temperature precursor supply in atomic layer deposition	Jarmo Maula, Hannu Leskinen, Pekka Kuosmanen, Kari Harkonen, Bradley J. Aitchison	2005-06-21	$1,064,000

Teemu Lang — 8 Patents

Issued Patents All Time

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