Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7191793 | Diaphragm valve for atomic layer deposition | Jarmo Maula, Hannu Leskinen, Teemu Lang, Kari Harkonen, Bradley J. Aitchison | 2007-03-20 |
| 7141095 | Precursor material delivery system for atomic layer deposition | Bradley J. Aitchison, Jarmo Maula, Hannu Leskinen, Teemu Lang, Kari Harkonen +1 more | 2006-11-28 |
| 7021330 | Diaphragm valve with reliability enhancements for atomic layer deposition | Jarmo Maula, Hannu Leskinen, Teemu Lang, Kari Harkonen, Bradley J. Aitchison | 2006-04-04 |
| 6941963 | High-speed diaphragm valve for atomic layer deposition | Jarmo Maula, Hannu Leskinen, Teemu Lang, Kari Harkonen, Bradley J. Aitchison | 2005-09-13 |
| 6907897 | Diaphragm valve for high-temperature precursor supply in atomic layer deposition | Jarmo Maula, Hannu Leskinen, Teemu Lang, Kari Harkonen, Bradley J. Aitchison | 2005-06-21 |