Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9071226 | Micromechanical resonator and method for manufacturing thereof | Antti Jaakkola | 2015-06-30 |
| 8925163 | Method of manufacturing laterally coupled BAW thin films | Johanna Meltaus, Markku Ylilammi, Tommi Riekkinen, Tomi Mattila | 2015-01-06 |
| 8916942 | Microelectromechanical resonator and a method for producing the same | Antti Jaakkola | 2014-12-23 |
| 8786166 | Micromechanical resonator array and method for manufacturing thereof | Antti Jaakkola, Jyrki Kiihamäki | 2014-07-22 |
| 8558643 | Micromechanical device including N-type doping for providing temperature compensation and method of designing thereof | Mika Prunnila, Antti Jaakkola | 2013-10-15 |
| 6476536 | Method of tuning BAW resonators | — | 2002-11-05 |