Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11489461 | Thin film actuator having transversely oriented structural stiffeners to increase actuator stroke | Risto Mutikainen, Marco Mattila, Nikolay Chekurov | 2022-11-01 |
| 8950057 | Parallel-plate structure fabrication method | Tomi Mattila | 2015-02-10 |
| 8925163 | Method of manufacturing laterally coupled BAW thin films | Johanna Meltaus, Tuomas Pensala, Markku Ylilammi, Tomi Mattila | 2015-01-06 |