Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10698320 | Method for optimized wafer process simulation | Ru-Gun Liu, Shih-Ming Chang, Shuo-Yen Chou, Chien-Wen Lai | 2020-06-30 |
| 10514613 | Pattern modification and patterning process | Shih-Ming Chang, Ru-Gun Liu, Shuo-Yen Chou, Chien-Wen Lai | 2019-12-24 |
| 7261981 | System and method of smoothing mask shapes for improved placement of sub-resolution assist features | Mark A. Lavin, Lars Liebmann, Scott M. Mansfield, Maharaj Mukherjee | 2007-08-28 |