Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7390753 | In-situ plasma treatment of advanced resists in fine pattern definition | Li-Te Lin, Huan-Just Lin, Yuan-Hung Chiu, Hun-Jan Tao | 2008-06-24 |
| 6864174 | Iteratively selective gas flow control and dynamic database to achieve CD uniformity | Li-Te Lin, Ming-Ching Chang, Li-Shung Chen, Huain-Jelin Lin, Yuan-Hong Chin +1 more | 2005-03-08 |