Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6864174 | Iteratively selective gas flow control and dynamic database to achieve CD uniformity | Li-Te Lin, Yui Wang, Ming-Ching Chang, Li-Shung Chen, Yuan-Hong Chin +1 more | 2005-03-08 |