Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9132523 | Chemical mechanical polish process control for improvement in within-wafer thickness uniformity | Shen-Nan Lee, Yu-Jen Cheng, Keung Hui, Huan-Just Lin | 2015-09-15 |
| 8129279 | Chemical mechanical polish process control for improvement in within-wafer thickness uniformity | Shen-Nan Lee, Yu-Jen Cheng, Keung Hui, Huan-Just Lin | 2012-03-06 |