Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982338 | High-throughput system and method for post-implantation single wafer warm-up | Tsun-Jen Chan, Cheng-Hung Hu, Kang Hua Chang, Ming-Te Chen | 2018-05-29 |
| 9663854 | High-throughput system and method for post-implantation single wafer warm-up | Tsun-Jen Chan, Cheng-Hung Hu, Kang Hua Chang, Ming-Te Chen | 2017-05-30 |
| 9378990 | Adjusting intensity of laser beam during laser operation on a semiconductor device | Lee-Te Tseng, Chih-Hsien Ou, Kun-Hsiang Lin, Ming-Te Chen | 2016-06-28 |
| 9070591 | Adjusting intensity of laser beam during laser operation on a semiconductor device | Lee-Te Tseng, Chih-Hsien Ou, Kun-Hsiang Lin, Ming-Te Chen | 2015-06-30 |