Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982338 | High-throughput system and method for post-implantation single wafer warm-up | Tsun-Jen Chan, Yi-Hann Chen, Kang Hua Chang, Ming-Te Chen | 2018-05-29 |
| 9663854 | High-throughput system and method for post-implantation single wafer warm-up | Tsun-Jen Chan, Yi-Hann Chen, Kang Hua Chang, Ming-Te Chen | 2017-05-30 |
| 9196452 | Methods and apparatus for carbon ion source head | Yi-Jiun Lee, Yh-Hsiu Hsiao, Kan Hwa Chang, Ming-Te Chen | 2015-11-24 |