Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605812 | Method reducing the effects of N2 gas contamination in an ion implanter | Chi-Bing Chen, Cheng-Yi Huang, Chao-Jie Tsai, Lu Chen, Hsing-Jui Lee | 2003-08-12 |
| 6530103 | Method and apparatus for eliminating wafer breakage during wafer transfer by a vacuum pad | Jeng-Yang Pan, Chia-Chun Wu, Wen-Fang Tang, Huai-Tei Yang | 2003-03-11 |
| 6444541 | Method for forming lining oxide in shallow trench isolation incorporating pre-annealing step | Jun-Yang Lai, Jih-Hwa Wang, Chou-Jie Tsai, Chin-Te Huang, Meng-Shiun Shieh +2 more | 2002-09-03 |
| 6372663 | Dual-stage wet oxidation process utilizing varying H2/O2 ratios | Chien-Jiun Wang, Jih-Hwa Wang | 2002-04-16 |