Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444541 | Method for forming lining oxide in shallow trench isolation incorporating pre-annealing step | Jun-Yang Lai, Jih-Hwa Wang, Chou-Jie Tsai, Chin-Te Huang, Su-Yu Yeh +2 more | 2002-09-03 |
| 6174644 | Anti-reflective silicon nitride film using in-situ deposition | Po-Chieh Cheng | 2001-01-16 |
| 5948598 | Anti-reflective silicon nitride film using in-situ deposition | Po-Chieh Cheng | 1999-09-07 |