Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6174644 | Anti-reflective silicon nitride film using in-situ deposition | Meng-Shiun Shieh | 2001-01-16 |
| 5948598 | Anti-reflective silicon nitride film using in-situ deposition | Meng-Shiun Shieh | 1999-09-07 |