Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9966427 | Metal-insulator-metal (MIM) capacitor with an electrode scheme for improved manufacturability and reliability | Shyh-Wei Cheng, Hung-Lin Chen, Shiuan-Jeng Lin, Tian Sheng Lin, Yu-Jui Wu +2 more | 2018-05-08 |
| 9884758 | Selective nitride outgassing process for MEMS cavity pressure control | Shyh-Wei Cheng, Hsi-Cheng Hsu, Hsin-Yu Chen, Ji-Hong Chiang, Wei-Ding Wu +3 more | 2018-02-06 |
| 9880192 | Method of manufacturing a motion sensor device | Shyh-Wei Cheng, Yu-Ting Hsu, Hsi-Cheng Hsu, Chih-Yu Wang, Che-Jung Chu | 2018-01-30 |
| 9561954 | Method of fabricating MEMS devices having a plurality of cavities | Shyh-Wei Cheng, Hsi-Cheng Hsu, Chih-Yu Wang, Jung-Kuo Tu, Che-Jung Chu +1 more | 2017-02-07 |
| 9527721 | Movement microelectromechanical systems (MEMS) package | Shyh-Wei Cheng, Chao-Po Lu, Chung-Hsien Hun, Chih-Shan Chen, Chuan-Yi Ko +4 more | 2016-12-27 |
| 9090452 | Mechanism for forming MEMS device | Shyh-Wei Cheng, Hsi-Cheng Hsu, Chih-Yu Wang, Chuan-Yi Ko, Ji-Hong Chiang +5 more | 2015-07-28 |
| 8960003 | Motion sensor device and methods for forming the same | Shyh-Wei Cheng, Yu-Ting Hsu, Hsi-Cheng Hsu, Chih-Yu Wang, Che-Jung Chu | 2015-02-24 |
| 8916943 | MEMS devices having a plurality of cavities | Shyh-Wei Cheng, Hsi-Cheng Hsu, Chih-Yu Wang, Jung-Kuo Tu, Che-Jung Chu +1 more | 2014-12-23 |
| 8846149 | Delamination resistant semiconductor film and method for forming the same | Yuh-Hwa Chang, Ming-Tai Chung, Ming-Yi Lin | 2014-09-30 |
| 7023003 | Ion implanter and method of preventing undesirable ions from implanting a target wafer | Chen Li, Chi-Chieh Wang, Tai-Kun Kao | 2006-04-04 |