Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049941 | Semiconductor isolation structure with air gaps in deep trenches | Hong-Seng Shue, Tai-I Yang, Wei-Ding Wu, Shao-Chi Yu | 2018-08-14 |
| 9269609 | Semiconductor isolation structure with air gaps in deep trenches | Hong-Seng Shue, Tai-I Yang, Wei-Ding Wu, Shao-Chi Yu | 2016-02-23 |
| 9096428 | Methods and apparatus for MEMS structure release | Tai-I Yang, Hong-Seng Shue, Ming-Yi Lin | 2015-08-04 |
| 8953155 | Optical inspection system and optical inspection method | Tai-I Yang, Hong-Seng Shue | 2015-02-10 |
| 8846149 | Delamination resistant semiconductor film and method for forming the same | Yuh-Hwa Chang, Jui-Chun Weng, Ming-Yi Lin | 2014-09-30 |