JC

Jr-Sheng Chen

TSMC: 11 patents #2,595 of 12,232Top 25%
Overall (All Time): #439,525 of 4,157,543Top 15%
11
Patents All Time

Issued Patents All Time

Showing 1–11 of 11 patents

Patent #TitleCo-InventorsDate
12412734 Baffle plate for controlling wafer uniformity and methods for making the same An-Chi Li, Shih-Che Huang, Chih-Hsien Hsu, Zhi-Hao Huang, Alex Wang +2 more 2025-09-09
12062523 Methods and systems for cooling plasma treatment components Cheng Kuang Tso, Chou-Feng Lee, Chih-Hsien Hsu, Chung-Hsiu Cheng 2024-08-13
11769652 Devices and methods for controlling wafer uniformity in plasma-based process An-Chi Li, Shih-Che Huang, Chih-Hsien Hsu, Zhi-Hao Huang, Ming-Chih Wang +2 more 2023-09-26
11615946 Baffle plate for controlling wafer uniformity and methods for making the same An-Chi Li, Shih-Che Huang, Chih-Hsien Hsu, Zhi-Hao Huang, Alex Wang +2 more 2023-03-28
10964547 Method of fabricating semiconductor structure Chin-Han Meng, Chih-Hsien Hsu, An-Chi Li, Lin-Ching Huang, Yu-Pei Chiang 2021-03-30
10957516 Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP Chin-Han Meng, Yin-Tun Chou, Chih-Hua Chan, Lin-Ching Huang, Yu-Pei Chiang 2021-03-23
10654713 Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths Chin-Han Meng, Chih-Hsien Hsu, Yu-Pei Chiang, Lin-Ching Huang 2020-05-19
10529578 Method of fabricating semiconductor structure Chin-Han Meng, Chih-Hsien Hsu, An-Chi Li, Lin-Ching Huang, Yu-Pei Chiang 2020-01-07
10273152 Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths Chin-Han Meng, Chih-Hsien Hsu, Yu-Pei Chiang, Lin-Ching Huang 2019-04-30
10131539 Method for forming micro-electro-mechanical system (MEMS) device structure Chin-Han Meng, Chih-Hsien Hsu, Chia-Chi Chung, Yu-Pei Chiang, Wen-Chih Chen +4 more 2018-11-20
9997336 Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP Chin-Han Meng, Yin-Tun Chou, Chih-Hua Chan, Lin-Ching Huang, Yu-Pei Chiang 2018-06-12