Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412734 | Baffle plate for controlling wafer uniformity and methods for making the same | An-Chi Li, Shih-Che Huang, Chih-Hsien Hsu, Zhi-Hao Huang, Alex Wang +2 more | 2025-09-09 |
| 12062523 | Methods and systems for cooling plasma treatment components | Cheng Kuang Tso, Chou-Feng Lee, Chih-Hsien Hsu, Chung-Hsiu Cheng | 2024-08-13 |
| 11769652 | Devices and methods for controlling wafer uniformity in plasma-based process | An-Chi Li, Shih-Che Huang, Chih-Hsien Hsu, Zhi-Hao Huang, Ming-Chih Wang +2 more | 2023-09-26 |
| 11615946 | Baffle plate for controlling wafer uniformity and methods for making the same | An-Chi Li, Shih-Che Huang, Chih-Hsien Hsu, Zhi-Hao Huang, Alex Wang +2 more | 2023-03-28 |
| 10964547 | Method of fabricating semiconductor structure | Chin-Han Meng, Chih-Hsien Hsu, An-Chi Li, Lin-Ching Huang, Yu-Pei Chiang | 2021-03-30 |
| 10957516 | Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP | Chin-Han Meng, Yin-Tun Chou, Chih-Hua Chan, Lin-Ching Huang, Yu-Pei Chiang | 2021-03-23 |
| 10654713 | Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths | Chin-Han Meng, Chih-Hsien Hsu, Yu-Pei Chiang, Lin-Ching Huang | 2020-05-19 |
| 10529578 | Method of fabricating semiconductor structure | Chin-Han Meng, Chih-Hsien Hsu, An-Chi Li, Lin-Ching Huang, Yu-Pei Chiang | 2020-01-07 |
| 10273152 | Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths | Chin-Han Meng, Chih-Hsien Hsu, Yu-Pei Chiang, Lin-Ching Huang | 2019-04-30 |
| 10131539 | Method for forming micro-electro-mechanical system (MEMS) device structure | Chin-Han Meng, Chih-Hsien Hsu, Chia-Chi Chung, Yu-Pei Chiang, Wen-Chih Chen +4 more | 2018-11-20 |
| 9997336 | Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP | Chin-Han Meng, Yin-Tun Chou, Chih-Hua Chan, Lin-Ching Huang, Yu-Pei Chiang | 2018-06-12 |