Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412734 | Baffle plate for controlling wafer uniformity and methods for making the same | Jr-Sheng Chen, Shih-Che Huang, Chih-Hsien Hsu, Zhi-Hao Huang, Alex Wang +2 more | 2025-09-09 |
| 11769652 | Devices and methods for controlling wafer uniformity in plasma-based process | Jr-Sheng Chen, Shih-Che Huang, Chih-Hsien Hsu, Zhi-Hao Huang, Ming-Chih Wang +2 more | 2023-09-26 |
| 11615946 | Baffle plate for controlling wafer uniformity and methods for making the same | Jr-Sheng Chen, Shih-Che Huang, Chih-Hsien Hsu, Zhi-Hao Huang, Alex Wang +2 more | 2023-03-28 |
| 10964547 | Method of fabricating semiconductor structure | Chin-Han Meng, Chih-Hsien Hsu, Jr-Sheng Chen, Lin-Ching Huang, Yu-Pei Chiang | 2021-03-30 |
| 10529578 | Method of fabricating semiconductor structure | Chin-Han Meng, Chih-Hsien Hsu, Jr-Sheng Chen, Lin-Ching Huang, Yu-Pei Chiang | 2020-01-07 |