Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10964547 | Method of fabricating semiconductor structure | Chin-Han Meng, Chih-Hsien Hsu, Jr-Sheng Chen, An-Chi Li, Yu-Pei Chiang | 2021-03-30 |
| 10957516 | Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP | Chin-Han Meng, Jr-Sheng Chen, Yin-Tun Chou, Chih-Hua Chan, Yu-Pei Chiang | 2021-03-23 |
| 10654713 | Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths | Chin-Han Meng, Jr-Sheng Chen, Chih-Hsien Hsu, Yu-Pei Chiang | 2020-05-19 |
| 10529578 | Method of fabricating semiconductor structure | Chin-Han Meng, Chih-Hsien Hsu, Jr-Sheng Chen, An-Chi Li, Yu-Pei Chiang | 2020-01-07 |
| 10273152 | Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths | Chin-Han Meng, Jr-Sheng Chen, Chih-Hsien Hsu, Yu-Pei Chiang | 2019-04-30 |
| 10131539 | Method for forming micro-electro-mechanical system (MEMS) device structure | Chin-Han Meng, Chih-Hsien Hsu, Chia-Chi Chung, Yu-Pei Chiang, Wen-Chih Chen +4 more | 2018-11-20 |
| 9997336 | Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP | Chin-Han Meng, Jr-Sheng Chen, Yin-Tun Chou, Chih-Hua Chan, Yu-Pei Chiang | 2018-06-12 |