Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062523 | Methods and systems for cooling plasma treatment components | Cheng Kuang Tso, Chou-Feng Lee, Chih-Hsien Hsu, Jr-Sheng Chen | 2024-08-13 |
| 10867816 | Method and apparatus for wafer backside cooling | Young-Shuen Chou, I-Che Chiu, Tsung-Hao Lu, Ken Liao | 2020-12-15 |
| 8673788 | Method of forming a layer on a semiconductor substrate having a plurality of trenches | Shih-Hao Wu, Chih-Hsien Hsu, Chia-Chi Chung, Wei-Yueh Tseng | 2014-03-18 |
| 6833233 | Deep UV-resistant photoresist plug for via hole | Pin-Yi Hsin, Ming Chyi Liu, Chih-Hsien Hsu | 2004-12-21 |