Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804392 | Method of monitoring tool | Chi-Ying Chang, Jih-Churng Twu, Chin-Yun Chen, Yi-Ting Chang, Feng-Yu CHEN | 2023-10-31 |
| 11569062 | Gas delivery system for ion implanter | Jih-Churng Twu, Yi-Ting Chang, Chao-Po Lu, Tsung-Min Lin | 2023-01-31 |
| 11239099 | Tool monitoring device and method of monitoring tool | Chi-Ying Chang, Jih-Churng Twu, Chin-Yun Chen, Yi-Ting Chang, Feng-Yu CHEN | 2022-02-01 |
| 11056365 | Fault detection method in semiconductor fabrication facility | Jih-Churng Twu, Chin-Yun Chen, Tai-Hsiang Lin, Yu-Chi Tsai | 2021-07-06 |
| 6787781 | Arc chamber filament for ion implanter | Mei-Lan Hung, Chi-Fu Yu, Shin-Ho Tzeng | 2004-09-07 |
| 6767407 | Auto-centering device for mechanical clamp | Chi-Fu Yu, Song Lin, Zuo-Chang Yen | 2004-07-27 |
| 6737663 | Apparatus and method for detecting tilt angle of a wafer platform | Song Lin, Hu SUN, Chi-Fu Yu, Wu-Han Jiang | 2004-05-18 |