Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804392 | Method of monitoring tool | Hom-Chung Lin, Chi-Ying Chang, Jih-Churng Twu, Chin-Yun Chen, Yi-Ting Chang | 2023-10-31 |
| 11239099 | Tool monitoring device and method of monitoring tool | Hom-Chung Lin, Chi-Ying Chang, Jih-Churng Twu, Chin-Yun Chen, Yi-Ting Chang | 2022-02-01 |
| 11133207 | Method for forming films on wafers separated by different distances | Wen-Bin Yang, Jian-Lun Lo | 2021-09-28 |
| 10930527 | Method for controlling temperature of furnace in semiconductor fabrication process | Jian-Lun Lo, Jih-Churng Twu, Yuan-Hsiao Su, Yi-Chi Huang, Yueh-Ting YANG +1 more | 2021-02-23 |
| 10741426 | Method for controlling temperature of furnace in semiconductor fabrication process | Jian-Lun Lo, Jih-Churng Twu, Yuan-Hsiao Su, Yi-Chi Huang, Yueh-Ting YANG +1 more | 2020-08-11 |