Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804392 | Method of monitoring tool | Hom-Chung Lin, Chi-Ying Chang, Jih-Churng Twu, Yi-Ting Chang, Feng-Yu CHEN | 2023-10-31 |
| 11239099 | Tool monitoring device and method of monitoring tool | Hom-Chung Lin, Chi-Ying Chang, Jih-Churng Twu, Yi-Ting Chang, Feng-Yu CHEN | 2022-02-01 |
| 11056365 | Fault detection method in semiconductor fabrication facility | Hom-Chung Lin, Jih-Churng Twu, Tai-Hsiang Lin, Yu-Chi Tsai | 2021-07-06 |