Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6887793 | Method for plasma etching a wafer after backside grinding | Feng-Ru Chang, Yeong-Rong Chang | 2005-05-03 |
| 6740471 | Photoresist adhesion improvement on metal layer after photoresist rework by extra N2O treatment | Dowson Jang, Wen-Han Hung, Yeong-Rong Chang | 2004-05-25 |
| 6652666 | Wet dip method for photoresist and polymer stripping without buffer treatment step | Ching-Tien Ma, Chen-Hsi Shih, Dian-Hau Chen, Cho-Ching Chen | 2003-11-25 |