Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6740471 | Photoresist adhesion improvement on metal layer after photoresist rework by extra N2O treatment | Gau-Ming Lu, Wen-Han Hung, Yeong-Rong Chang | 2004-05-25 |
| 6174777 | Method for fabricating a self aligned contact using a reverse self aligned contact etch | — | 2001-01-16 |
| 5915202 | Blanket etching process for formation of tungsten plugs | Chi-Hsin Lo, Woei Ji Song | 1999-06-22 |
| 5755891 | Method for post-etching of metal patterns | Chi-Hsin Lo, Hsueh-Liang Chiu | 1998-05-26 |