Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7392818 | Slurry dispensing system | Ming-Tzung Hsu, Paul Tan, Chiang-Jeh Chen, Hui-Ming Chu | 2008-07-01 |
| 6652666 | Wet dip method for photoresist and polymer stripping without buffer treatment step | Ching-Tien Ma, Chen-Hsi Shih, Dian-Hau Chen, Gau-Ming Lu | 2003-11-25 |
| 6401361 | Apparatus and method for drying wafers by a solvent | Shin-Shing Yang, Jenn-Wei Ju, Liang-Yi Chou, Chih-Hong Cheng | 2002-06-11 |