Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8236699 | Contact patterning method with transition etch feedback | Byung-Goo Jeon, Sung Chul Park, Nikki Edleman, Alois Gutmann | 2012-08-07 |
| 7998869 | Contact patterning method with transition etch feedback | Byung-Goo Jeon, Sung Chul Park, Nikki Edleman, Alois Gutmann | 2011-08-16 |
| 7092096 | Optical scatterometry method of sidewall spacer analysis | Hun-Jan Tao | 2006-08-15 |
| 6777340 | Method of etching a silicon containing layer using multilayer masks | Hsien-Kuang Chiu, Hun-Jan Tao, Yuan-Hung Chiu, Jeng-Horng Chen | 2004-08-17 |