Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9659796 | Rinsing wafers using composition-tunable rinse water in chemical mechanical polish | Ming-Che Ho | 2017-05-23 |
| 7966968 | Electroless plating apparatus with non-liquid heating source | Chien Ling Hwang | 2011-06-28 |
| 7746131 | Reset signal filter | Che-Li Lin | 2010-06-29 |
| 7416648 | Image sensor system for monitoring condition of electrode for electrochemical process tools | Wen-Chih Chiou, Ying-Ho Chen | 2008-08-26 |
| 7335088 | CMP system with temperature-controlled polishing head | Jerry Hwang | 2008-02-26 |