CC

Che-Fu Chen

TSMC: 30 patents #1,141 of 12,232Top 10%
Overall (All Time): #122,460 of 4,157,543Top 3%
30
Patents All Time

Issued Patents All Time

Showing 1–25 of 30 patents

Patent #TitleCo-InventorsDate
12420314 Semiconductor cleaning apparatus and method Ian Hsieh 2025-09-23
12414347 Method of manufacturing a semiconductor device and a semiconductor device Hsu Ming Hsiao, Shen-Ping Wang, Kung Shu Hsu, Hong Pin Lin, Shiang-Bau Wang 2025-09-09
12165909 Screwless semiconductor processing chambers Bo-Ru CHEN, Yan Liu 2024-12-10
12154813 Electrostatic chuck sidewall gas curtain Ian Hsieh, Yan Liu 2024-11-26
12090503 Semiconductor process chamber contamination prevention system Kai Wei 2024-09-17
12068398 Fin field-effect transistor with void and method of forming the same Hsu Ming Hsiao, Ming-Jhe Sie, Hsiu-Hao Tsao, Hong Pin Lin, An Chyi Wei +1 more 2024-08-20
12040205 Systems and methods for inspection stations Yan Liu, Chien-Chih Wu 2024-07-16
12027594 Method of manufacturing a semiconductor device and a semiconductor device Hsu Ming Hsiao, Shen-Ping Wang, Kung Shu Hsu, Hong Pin Lin, Shiang-Bau Wang 2024-07-02
11837484 Robot arm device and method for transferring wafer Wei-Hua Houng 2023-12-05
11779949 Semiconductor process chamber contamination prevention system Kai Wei 2023-10-10
11756840 Reflectance measurement system and method thereof Yan Liu, Daniel Yang 2023-09-12
11710620 Semiconductor process chamber with heat pipe Kai Wei 2023-07-25
11664260 Systems and methods for orientator based wafer defect sensing Yan Liu, Daniel Yang 2023-05-30
11664444 Fin field-effect transistor with void and method of forming the same Hsu Ming Hsiao, Ming-Jhe Sie, Hsiu-Hao Tsao, Hong Pin Lin, An Chyi Wei +1 more 2023-05-30
11664265 Systems and methods for robotic arm sensing Yan Liu, Ming-Feng Chen, Hung-Wen Chen 2023-05-30
11600517 Screwless semiconductor processing chambers Bo-Ru CHEN, Yan Liu 2023-03-07
11521884 Electrostatic chuck sidewall gas curtain Ian Hsieh, Yan Liu 2022-12-06
11456203 Wafer release mechanism Yan Liu 2022-09-27
11443966 Semiconductor processing flow field control apparatus and method Kai Wei 2022-09-13
11211232 Methods for cleaning semiconductor device manufacturing apparatus Ian Hsieh, Yan Liu 2021-12-28
11177150 Cluster tool and method using the same Wei-Hua Houng 2021-11-16
11177183 Thickness measurement system and method Yan Liu, Chien-Chih Wu 2021-11-16
11139149 Gas injector Yan Liu, Ming-Feng Chen, Li-Shi Liu 2021-10-05
11101163 Systems and methods for automated robotic arm sensing Yan Liu, Hung-Wen Chen 2021-08-24
11031264 Semiconductor device manufacturing system Yan Liu 2021-06-08