Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837484 | Robot arm device and method for transferring wafer | Che-Fu Chen | 2023-12-05 |
| 11581181 | Orientation chamber of substrate processing system with purging function | — | 2023-02-14 |
| 11177150 | Cluster tool and method using the same | Che-Fu Chen | 2021-11-16 |
| 11004713 | Robot arm device and method for transferring wafer | Che-Fu Chen | 2021-05-11 |
| 10854442 | Orientation chamber of substrate processing system with purging function | — | 2020-12-01 |